Diffuse surface interference position sensor

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United States of America Patent

PATENT NO 5783752
SERIAL NO

08803420

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Position of a diffusely scattering surface is detected by interfering backscattered light from respective input beams which illuminate a common spot. Through polarization of the input beams and appropriate filtering, backscattered light is isolated from specularly reflected light and interfered to form a fringe pattern on a detector. The position sensor has particular applicability as a push pin sensor in a hard disk servo system.

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Patent Owner(s)

Patent OwnerAddress
GSI LUMONICS CORPORATION39 MANNING ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horwitz, Bruce A Centre, MA 33 650
Mitchell, Donald K Newton, MA 13 225
Thorburn, William G Whitinsville, MA 16 240

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