Method of manufacturing an ink ejection recording head and a recording apparatus using the recording head
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United States of America Patent
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Aug 4, 1998
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N/A
app pub date -
Dec 9, 1996
filing date -
Dec 8, 1995
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Abstract
In an ink ejection recording head, a silicon dioxide layer is formed on the surface of a silicon substrate, a silicon nitride layer is formed on the silicon dioxide layer, and a plurality of heaters are formed on the silicon nitride layer. The heater is constituted by a thin film resistor made from a Ta--Si--O alloy and a thin film conductor made from nickel. Further, a gold layer is formed through plating on at least a portion of the thin film conductor to be connected to another conductor prior to thermally oxidizing the heaters.
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