Condition responsive sensor
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United States of America Patent
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Aug 11, 1998
Grant Date -
N/A
app pub date -
Sep 30, 1996
filing date -
Sep 30, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A condition responsive capacitive transducer, such as an accelerometer, is shown using a material system having refractory metal for the sensing element and glass material for a supporting substrate. The refractory metal is preferably tungsten, tantalum or molybdenum, and is coated with a glass seal enhancing material, such as titanium or nickel.
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