Zero dead-leg valve structure
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United States of America Patent
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Aug 18, 1998
Issued Date -
N/A
app pub date -
Dec 31, 1996
filing date -
Apr 9, 1993
priority date (Note) -
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Abstract
A valve structure without dead-legs is provided for controlling the flow of gases in a semiconductor fabrication facility. The valve structure comprises a conduit forming a loop with three ports. Flexible metallic diaphragms are selectively operable to open and close two of the ports.
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