Apparatus for damping a crystal ingot suspension in a Czochralski crystal puller
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United States of America Patent
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Aug 25, 1998
Grant Date -
N/A
app pub date -
Feb 26, 1996
filing date -
Feb 26, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Orbital oscillations of the crystal ingot suspended in a cable in a Czochralski crystal puller are damped by mechanically connecting a high-temperature conductor to the ingot and generating a magnetic field in the vicinity of the conductor. The magnetic field induces an eddy current in the conductor when the ingot moves. The eddy current then interacts with the magnetic field to damp motion of the ingot. In one embodiment, the magnetic field generator is moved as the ingot grows to maintain the magnetic field in the vicinity of the conductor. In another embodiment, the strength of the magnetic field is adjusted dependent on the amplitude of the oscillations to conserve power.
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