Exposure apparatus correcting illuminance distribution
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United States of America Patent
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Aug 25, 1998
Grant Date -
N/A
app pub date -
Dec 21, 1995
filing date -
Dec 26, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention relates to an illumination optical apparatus capable of correcting unevenness of an illuminance distribution on an illuminated surface, particularly slant unevenness thereof. The illumination optical apparatus comprises a light source unit for supplying a nearly parallel beam, a multi-light-source forming system for forming a plurality of light source images, based on the light beam from the light source unit, a condenser optical system for condensing the light from the multi-light-source forming system to illuminate a surface of an object in a superimposed manner, and a deflecting device for changing an angle of incidence of the light into the multi-light-source forming system, disposed in an optical path between the light source unit and the multi-light-source forming system.
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