Device for masking or covering substrates

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United States of America Patent

PATENT NO 5800687
SERIAL NO

08834142

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Abstract

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A device including a sputtering cathode 2 and masks for masking or covering portions of a surface of a substrates 27, having a center mask guide element 56 on which a center mask 26, which covers the substrate 27, is disposed and works together with an outer mask 4 in such a way that only the uncovered part of the substrate 27 is coated during the coating process. The inner and/or the outer masks 4, 26 can be adjusted independently of each other along a longitudinal center axis 58 of the device.

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Patent Owner(s)

Patent OwnerAddress
SINGULUS TECHNOLOGIES GMBHJUNKERSSTRASSE 1 63755 ALZENAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kempf, Stefan Alzenau-Albstadt, DE 40 393

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