Electrostatic chuck with polymeric impregnation and method of making

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United States of America Patent

PATENT NO 5800871
SERIAL NO

08689947

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Abstract

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An electrostatic chuck includes a pedestal having a metallic upper surface, and a layer of a porous dielectric material formed on said upper surface of the pedestal. The dielectric layer is impregnated with a plasma-resistant sealant.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buchberger, Douglas Tracy, CA 25 1664
Collins, Kenneth S San Jose, CA 308 25148
Tsui, Joshua Chiu-Wing Santa Clara, CA 6 346

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