Importance

Loading Importance Indicators...

Abstract

A printer head for ink jet recording is disclosed, comprising a single-crystal silicon substrate pierced with holes, a zirconium oxide layer which is brought into direct contact with the surface of the silicon substrate or a silicon oxide layer on the surface of the silicon substrate so as to cover one end of the holes in the silicon substrate, a lower electrode provided on the zirconium oxide layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. A process for the preparation of the above printer head for ink jet recording is also disclosed. The printer head for ink jet recording can support a piezoelectric substance having a high piezoelectricity, can exhibit a high head drive durability and can be produced in a high yield.

Loading the Abstract Image...

First Claim