Multizone bake/chill thermal cycling module
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United States of America Patent
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Sep 8, 1998
Issued Date -
N/A
app pub date -
Jul 31, 1997
filing date -
Jul 31, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A thermal cycling module includes an array of thermoelectric devices ?36! divided into multiple zones ?A, B, C, D! independently controlled by corresponding variable power supplies ?56, 58, 60, 62!. The thermoelectric devices ?36! provide localized, precise, and rapid control of both heating and cooling, while fluid from one of several fluid supplies ?64, 66, 68! provides bulk heating or cooling via a fluid heat exchanger ?38!. Sensors ?46, 48, 50, 52! provide feedback of temperature or other process parameters to a controller ?54! which generates control signals for controlling the power supplies ?56, 58, 60, 62!, the fluid supplies ?64, 66, 68!, and fluid valves ?70, 72! which control fluid flow through the heat exchanger ?38!.
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