Resist processing apparatus having an interface section including two stacked substrate waiting tables
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Sep 8, 1998
Grant Date -
N/A
app pub date -
Apr 26, 1995
filing date -
Apr 26, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A processing system comprising a loading/unloading section, a processing section and an interface section. The system further comprises a convey mechanism and at least two waiting sections. The convey mechanism can move in either direction between between the loading/unloading section and the interface section, for conveying objects to the processing units included in the processing section and conveying objects in either direction between the loading/unloading section and the interface section. The waiting sections are provided for temporarily holding an object before the convey mechanism conveys an object to the interface section.
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