Compact disc spin coater
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United States of America Patent
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-
Sep 8, 1998
Grant Date -
N/A
app pub date -
Aug 21, 1995
filing date -
Aug 21, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for the spin coating of substrates including a substrate carrier, a motor for rotating the substrate carrier, and a spinning bowl surrounding the substrate carrier. A lid is also provided in this spin coating apparatus which at least partially covers the spinning bowl for diminishing the escape for fumes into the ambient atmosphere during the spin coating of a substrate carried by the substrate carrier. The lid is also designed for improving the air flow around the substrate carried by the substrate carrier during the spin coating of the substrate.
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