Method of forming a microstructure
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United States of America Patent
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Sep 8, 1998
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N/A
app pub date -
May 28, 1996
filing date -
Jun 28, 1995
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Abstract
Method of forming a complex, minute three-dimensional structure, known as micromachining, which includes forming a plurality of thin films at least one of which is provided as a temporary layer composed of a lower layer made of an organic material and an upper layer made of an amphoteric metal material which is formed on the lower layer; and selectively removing the temporary layer to provide a three-dimensional structure. The temporary layer may comprise a composite sacrificial layer of photoresist and aluminum.
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