Importance

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Abstract

A probe apparatus comprising a table on which a semiconductor wafer is mounted, the wafer having a circuit connected to a plurality of pads, a probe card assembly positioned relative to a reference plane, and having a card body and groups of probes held by a card holder, a drive system for moving the table up and down to cause the pads to be contacted with probe tips, a test head for sending test signal to the circuit through probes and pads, which are contacted with one another, to test the electric property of the circuit, a sensor for detecting the probe tip profile or levels at plural points of the probe card assembly, a controller for calculating the tilting degree and direction of probe tip profile of probe groups on the basis of results thus detected to thereby send correction commands, and a tilt correction unit for supporting the card holder and adjusting a level of the card holder at the plural points, responsive to the command applied from the controller, to thereby make the probe tip profile of each probe group parallel to the reference plane.

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First Claim