Semiconductor probe card for low current measurements

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United States of America Patent

PATENT NO 5808475
SERIAL NO

08660441

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Abstract

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A semiconductor probe card is provided with low dielectric absorption feed-through contacts to isolate test lines from printed circuit board leakage effects.

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Patent Owner(s)

Patent OwnerAddress
KEITHLEY INSTRUMENTS INC28775 AURORA ROAD CLEVELAND OH 44139

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bennett, Robert Mantua, OH 603 83089
Knauer, William Chagrin Falls, OH 32 276

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