Ultra high purity gas distribution component with integral valved coupling and methods for its use
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United States of America Patent
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Sep 22, 1998
Grant Date -
N/A
app pub date -
Feb 21, 1996
filing date -
Feb 21, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Valved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount of the wetted surface of the coupler is exposed to the external environment. A gas processing component (e.g., a filter), or an entire integrated gas stick assembly, may be sealed from the exterior environment at both its inlet and outlet sides, by these valved couplers. As a result, the entire device can be purged after manufacture and left in a controlled environment during shipment and installation, reducing the need for purging after installation.
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