US Patent No: 5,811,685

Number of patents in Portfolio can not be more than 2000

Fluid pressure sensor with contaminant exclusion system

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Abstract

A variable capacitance fluid pressure sensor of the type which includes a deflectable member includes a contaminant exclusion system which protects the deflectable member from both solid and non-solid fluid-borne contaminants. A system of traps disposed between the fluid inlet to the sensor and the deflectable member prevents deposition of process vapors in the fluid on the deflectable member and collects a variety of sizes of fluid-borne solid contaminants remote from the deflectable member.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MKS INSTRUMENTS, INC.WILMINGTON, MA416

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grudzien, Jr Christopher P Mansfield, MA 10 66

Cited Art

Patent Info (Count) # Cites Year
 
MKS INSTRUMENTS, INC. (2)
4,785,669 Absolute capacitance manometers 55 1987
5,515,711 Pressure measurement and calibration apparatus using gravity-induced diaphragm deflection 8 1995
 
BELL MICROCOMPONENTS, INC. (1)
4,562,742 Capacitive pressure transducer 55 1985
 
HITACHI, LTD. (1)
2005/0186,696 Gas flowmeter and manufacturing method thereof 2005

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
MKS INSTRUMENTS, INC. (10)
6,443,015 Baffle for a capacitive pressure sensor 12 1999
7,252,011 Surface area deposition trap 0 2002
6,993,973 Contaminant deposition control baffle for a capacitive pressure transducer 3 2003
7,201,057 High-temperature reduced size manometer 2 2004
7,141,447 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 1 2004
7,284,439 Method for producing a pressure sensor for detecting small pressure differences and low pressures 2 2004
7,204,150 Turbo sump for use with capacitive pressure sensor 1 2005
7,389,697 Pressure sensor for detecting small pressure differences and low pressures 0 2005
7,624,643 Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor 1 2006
7,316,163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 3 2006
 
ROSEMOUNT INC. (5)
6,782,754 Pressure transmitter for clean environments 12 2000
7,347,099 Pressure transducer with external heater 0 2004
7,679,033 Process field device temperature control 0 2005
7,240,561 Process adapter 0 2005
7,779,698 Pressure sensor 2 2007
 
LAM RESEARCH CORPORATION (1)
6,901,808 Capacitive manometer having reduced process drift 14 2003