Fluid pressure sensor with contaminant exclusion system
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United States of America Patent
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Sep 22, 1998
Grant Date -
N/A
app pub date -
Dec 11, 1996
filing date -
Dec 11, 1996
priority date (Note) -
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Abstract
A variable capacitance fluid pressure sensor of the type which includes a deflectable member includes a contaminant exclusion system which protects the deflectable member from both solid and non-solid fluid-borne contaminants. A system of traps disposed between the fluid inlet to the sensor and the deflectable member prevents deposition of process vapors in the fluid on the deflectable member and collects a variety of sizes of fluid-borne solid contaminants remote from the deflectable member.
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