Importance

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Abstract

A microscope with a C-shaped stand (1) for examining large-sized, disk-shaped objects (9), such as semiconductor wafers, comprises a base plate (2), a vertical portion (3) extending from the base plate, and a limb portion (4) extending forwardly from the top of the vertical portion. To achieve an ergonomic sitting position of an observer (B) and to be able to inspect the entire object surface, the vertical portion (3) has a forwardly opening slot-shaped recess (10) into which the object partially enters when it is at a rearmost position. The recess (10) is geometrically designed so as not to impair the stability of stand (1). In addition or as an alternative, a horizontally movable specimen stage (5) of the microscope includes a rearwardly opening recess (14) for partially receiving the vertical portion (3) when the stage is at its rearmost travel limit. The recess (14) may be U-shaped or specifically configured to correspond to the shape of the vertical portion (3 which it receives. The invention enables extended travel of the specimen stage (5) to bring the geometric center of specimen stage (5) and supported object (9) closer to vertical portion (3).

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First Claim