Arrangement for generating a purified, low-turbulence air flow for supplying local clean rooms
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United States of America Patent
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Sep 29, 1998
Grant Date -
N/A
app pub date -
Jun 13, 1996
filing date -
Oct 13, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An arrangement for generating a purified, low-turbulence air flow for supplying local clean rooms is aimed to reduce the constructional depth of an air processing installation and, in addition, to extensively prevent the transmission of vibrations from the air flow-generator to the equipment unit to be supplied. The wall of the plenum chamber located opposite an outlet opening in the plenum chamber adjoins a filter accommodated in a plenum chamber at the side for the inlet of unpurified air. A space remains open between the wall and the filter. This space communicates with the rest of the space in the plenum chamber and serves primarily to form the plenum. The arrangement is applicable in the manufacturing of integrated circuits.
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