Semiconductor integrated circuit device having a ceramic thin film capacitor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5818079
SERIAL NO

08664217

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A ferroelectric capacitor comprising a lower electrode, a ceramic capacity film made of a ferroelectric substance and an upper electrode is provided on a substrate insulating film formed on a semiconductor substrate. A layer insulating film is formed on the semiconductor substrate so as to cover the ferroelectric capacitor. An electrode wiring is formed on the layer insulating film. A length L of the surface of the ceramic capacity film which is present between an intersection of the side of the upper electrode and the upper face of the ceramic capacity film and an intersection of the side of the ceramic capacity film and the upper face of the lower electrode and a thickness D of the ceramic capacity film have a relationship of L.gtoreq.2D.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.OSAKA10842

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Noma, Atsushi Osaka, JP 10 61
Ueda, Daisuke Osaka, JP 176 1751

Cited Art Landscape

Patent Info (Count) # Cites Year
 
FREESCALE SEMICONDUCTOR, INC. (1)
* 5258093 Procss for fabricating a ferroelectric capacitor in a semiconductor device 67 1992
 
RENESAS ELECTRONICS CORPORATION (1)
* 5406447 Capacitor used in an integrated circuit and comprising opposing electrodes having barrier metal films in contact with a dielectric film 90 1992
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
* 5572052 Electronic device using zirconate titanate and barium titanate ferroelectrics in insulating layer 171 1995
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
7047637 Method of manufacture of ceramic composite wiring structures for semiconductor devices 25 2004
 
OUME ELECTRONICS CO., LTD. (1)
6847066 Semiconductor device 48 2001
 
DONGBUANAM SEMICONDUCTOR INC. (1)
6482695 Method for fabricating semiconductor device including stacked capacitors 3 2000
 
TDK CORPORATION (1)
8997321 Method of manufacturing a thin film capacitor having separated dielectric films 0 2012
 
GLOBALFOUNDRIES INC. (3)
* 6507476 Tuneable ferroelectric decoupling capacitor 5 1999
6888714 Tuneable ferroelectric decoupling capacitor 72 2002
* 2003/0112,578 Tuneable ferroelectric decoupling capacitor 1 2002
 
DOWA MINING CO., LTD. (2)
* 7048866 Metal/ceramic bonding article and method for producing same 0 2003
* 2003/0224,199 Metal/ceramic bonding article and method for producing same 0 2003
 
L PIERRE DEROCHEMONT (1)
* 2006/0200,958 Method of manufacture of ceramic composite wiring structures for semiconductor devices 2 2006
 
HITACHI, LTD. (1)
* 6906365 Ferroelectric memory device including an upper protection electrode 0 2001
 
LG Semicon Co., Ltd. (2)
* 6136639 Semiconductor memory device and method for fabricating the same 8 1998
6489644 Semiconductor memory device and method for fabricating the same 2 2000
 
AOI ELECTRONICS CO., LTD. (1)
* 6545354 Semiconductor device having a barrier layer 89 2000
 
NEC CORPORATION (1)
* 6144051 Semiconductor device having a metal-insulator-metal capacitor 24 1998
 
Ultrasource, Inc. (9)
6761963 Integrated thin film capacitor/inductor/interconnect system and method 21 2001
6998696 Integrated thin film capacitor/inductor/interconnect system and method 8 2003
6890629 Integrated thin film capacitor/inductor/interconnect system and method 10 2003
7327582 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2005/0175,938 Integrated thin film capacitor/inductor/interconnect system and method 3 2005
7425877 Lange coupler system and method 1 2005
* 2005/0162,236 Lange coupler system and method 2 2005
7446388 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2006/0097,344 Integrated thin film capacitor/inductor/interconnect system and method 0 2005
 
LONGITUDE SEMICONDUCTOR S.A.R.L. (2)
* 6150684 Thin-film capacitor and method of producing same 15 1999
6323057 Method of producing a thin-film capacitor 28 2000
 
TERAMIKROS, INC. (1)
RE41511 Semiconductor device having a thin-film circuit element provided above an integrated circuit 0 2007
 
RENESAS ELECTRONICS CORPORATION (2)
* 6818469 Thin film capacitor, method for manufacturing the same and printed circuit board incorporating the same 30 2003
* 2003/0219,956 Thin film capacitor, method for manufacturing the same and printed circuit board incorporating the same 19 2003
 
FUJITSU SEMICONDUCTOR LIMITED (3)
* 6559496 Semiconductor device and manufacturing method of the same 6 2001
* 2002/0149,049 Semiconductor device and manufacturing method of the same 3 2001
6693003 Semiconductor device and manufacturing method of the same 2 2003
 
DEROCHEMONT, L. PIERRE (1)
6323549 Ceramic composite wiring structures for semiconductor devices and method of manufacture 23 1999
 
NEC ELECTRONICS CORPORATION (2)
* 6410953 Integrated circuit device with MIM capacitance circuit 0 2001
* 6340832 MIM capacitor having reduced capacitance error and phase rotation 11 2001
 
CASIO COMPUTER CO., LTD. (1)
6870256 Semiconductor device having a thin-film circuit element provided above an integrated circuit 16 2002
* Cited By Examiner