Substrate structure and assembly method for reduced spatial light modulator size
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United States of America Patent
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Oct 6, 1998
Issued Date -
N/A
app pub date -
Sep 9, 1997
filing date -
Jul 23, 1996
priority date (Note) -
Expired
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Abstract
A spatial light modulator designed to use a minimum area on the surface of a silicon substrate. This invention comprises a silicon substrate on a back plate with a glass cover that is used to seal liquid crystal between the glass cover and the silicon substrate. Most importantly, the glue seal formed to contain the liquid crystal material is between the cover glass plate and the Si substrate on only one side and the back plate on the remaining three sides. This structure allows a smaller semiconductor substrate to be used.
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