Electron microscope specimen supports
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United States of America Patent
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Oct 13, 1998
Grant Date -
N/A
app pub date -
Aug 28, 1996
filing date -
Sep 8, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A specimen support for use in an electron microscope comprises a deposited diamond film. The film is deposited on a substrate using a plasma assisted chemical vapor deposition process and then machined to a desired configuration using a laser machining process. Molybdenum, tungsten or silicon are used as substrates.
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