Heated stage for a scanning probe microscope
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United States of America Patent
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Oct 13, 1998
Issued Date -
N/A
app pub date -
Oct 11, 1996
filing date -
Nov 7, 1995
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.
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