Encapsulated capacitor structure having a dielectric interlayer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5822175
SERIAL NO

08946947

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An encapsulated capacitor structure and method for fabricating same. The capacitor structure is created by selectively depositing a lower electrode, a dielectric thin film of BST or other ferrodielectric, and an upper electrode, onto a substrate, and subsequently depositing a conformal layer of a non-reductively deposited dielectric material. Contact windows are then opened through the encapsulating layer for contacting the capacitor electrodes. The underlying structure is protected by the encapsulating layer from metal deposition and post-processing which would otherwise damage the structure.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
MATSUSHITA ELECTRONICS CORPORATIONOSAKA11

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Azuma, Masamichi Colorado Springs, CO 45 673

Cited Art Landscape

Patent Info (Count) # Cites Year
 
RPX CLEARINGHOUSE LLC (1)
* 5330931 Method of making a capacitor for an integrated circuit 59 1993
 
RAMTRON INTERNATIONAL CORPORATION (1)
* 5206788 Series ferroelectric capacitor structure for monolithic integrated circuits and method 82 1991
 
TDK CORPORATION (1)
* 5576222 Method of making a semiconductor image sensor device 34 1994
 
ROHM CO., LTD. (2)
* 5355277 Thin film capacitor 9 1992
* 5506748 Capacitor for semiconductor integrated circuit 18 1994
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 2004/0077,168 Etchant and method for fabricating a semiconductor device using the same 0 2003
 
CYPRESS SEMICONDUCTOR CORPORATION (1)
9092582 Low power, low pin count interface for an RFID transponder 0 2010
 
RAMTRON INTERNATIONAL CORPORATION (1)
* 6281023 Completely encapsulated top electrode of a ferroelectric capacitor using a lead-enhanced encapsulation layer 39 2001
 
AVX CORPORATION (4)
6324048 Ultra-small capacitor array 86 1998
* 6285542 Ultra-small resistor-capacitor thin film network for inverted mounting to a surface 77 1999
6519132 Ultra-small capacitor array 8 2000
6832420 Method of manufacturing a thin film capacitor array 13 2002
 
CDA PROCESSING LIMITED LIABILITY COMPANY (1)
* 2006/0254,812 Printed circuit boards having embedded thick film capacitors 1 2006
 
MICRON TECHNOLOGY, INC. (4)
6855971 Haze-free BST films 1 2001
6939723 Method of forming haze-free BST films 0 2003
* 6924968 Haze-free BST films 0 2003
6852593 Haze-free BST films 1 2003
 
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS (1)
* 6888204 Semiconductor devices, and methods for same 5 1998
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
* 9263511 Package with metal-insulator-metal capacitor and method of manufacturing the same 0 2013
* 2014/0225,222 PACKAGE WITH METAL-INSULATOR-METAL CAPACITOR AND METHOD OF MANUFACTURING THE SAME 62 2013
 
SAMSUNG ELECTRONICS CO., LTD. (2)
* 6815681 Electron beam lithography apparatus using a patterned emitter 1 2003
* 2004/0007,680 Electron beam lithography apparatus using a patterned emitter 4 2003
 
FUJITSU LIMITED (5)
* 6624501 Capacitor and semiconductor device 6 2001
6873038 Capacitor and semiconductor device and method for fabricating the semiconductor device 1 2003
* 2004/0018,693 Capacitor and semiconductor device and method for fabricating the semiconductor device 1 2003
7339277 Semiconductor device having passive component and support substrate with electrodes and through electrodes passing through support substrate 5 2005
* 2005/0156,279 Capacitor and semiconductor device and method for fabricating the semiconductor device 3 2005
 
Newport Fab, LLC (1)
* 6411492 Structure and method for fabrication of an improved capacitor 11 2000
 
HITACHI, LTD. (1)
* 6889431 Manufacturing method of electronic circuit including multilayer circuit board 3 2002
 
NEXPERIA B.V. (1)
* 6125027 Component comprising a capacitor 20 1997
 
OL SECURITY LIMITED LIABILITY COMPANY (3)
6720096 Dielectric element 3 2000
6888189 Dielectric element including oxide-based dielectric film and method of fabricating the same 4 2001
* 6762476 Dielectric element including oxide dielectric film and method of manufacturing the same 0 2002
 
THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA (2)
7768050 Ferroelectric thin films 11 2007
8022454 Ferroelectric thin films 0 2010
 
Ultrasource, Inc. (8)
* 6998696 Integrated thin film capacitor/inductor/interconnect system and method 8 2003
* 2004/0080,021 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
7327582 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2005/0175,938 Integrated thin film capacitor/inductor/interconnect system and method 3 2005
7425877 Lange coupler system and method 1 2005
* 2005/0162,236 Lange coupler system and method 2 2005
7446388 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2006/0097,344 Integrated thin film capacitor/inductor/interconnect system and method 0 2005
 
eScreen, Inc. (2)
7943381 Method for testing specimens located at a plurality of service sites 2 2006
* 2007/0048,875 METHOD AND SYSTEM FOR TESTING AND CONTROLLING A CUSTODY OF A FLUID SPECIMEN 2 2006
 
SYMETRIX CORPORATION (2)
* 6180971 Capacitor and method of manufacturing the same 14 1998
6455327 Method of manufacturing a ferroelectric capacitor 4 2000
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
* 8614497 Method for fabricating a MIM capacitor using gate metal for electrode and related structure 2 2009
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (3)
* 2002/0182,802 Capacitor and method for fabricating the same 1 2002
* 7288807 Semiconductor device with capacitor element 6 2006
* 2007/0170,548 Semiconductor device and method for fabricating the same 4 2006
* Cited By Examiner