Method for masking a disk shaped substrate
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United States of America Patent
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-
Oct 20, 1998
Issued Date -
N/A
app pub date -
Oct 10, 1995
filing date -
Mar 9, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a mask (7) for covering the outer marginal area of a disk-shaped substrate surface during a coating process, for example a vacuum sputtering or vapor depositing process, the mask (7) is made of an elastic material in the form of a planar plate with an essentially circular opening. To center and lock it onto the substrate (1) an inwardly extending annular flange is provided which assumes the actual masking function and extends in a plane parallel to the plane of the plate. The substrate (1) is laid on this flange and retained by projections extending radially inward. Prior to positioning the substrate it is bowed axially to spread apart the projections.
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