Substrate processing device and method for substrate from the substrate processing device
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United States of America Patent
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Oct 20, 1998
Grant Date -
N/A
app pub date -
Mar 4, 1996
filing date -
Mar 6, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Main lifter pins and sub-lifter pins are arranged on the top surface of a plate to support a rectangular frame area of a glass substrate of a liquid crystal display. The rectangular frame area is an area surrounding a rectangular center area which is a surface area requiring processing. The main lifter pins and sub-lifter pins cooperate to push up the substrate from the top surface of the plate after a surface processing of the substrate on the plate is completed. The main lifter pins and the sub-lifter pins are arranged to contact a pair of shorter sides and a pair of longer sides of the rectangular frame area, respectively. The substrate is easily removed from the plate without being bent due to its own weight. Then, the main lifter pins further push up the substrate to a level at which the substrate is transferred to a transporter robot.
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