Composite shape memory micro actuator
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United States of America Patent
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Oct 20, 1998
Grant Date -
N/A
app pub date -
Oct 25, 1996
filing date -
Oct 27, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-dimensioned shape memory alloy composite composed of a thin film of shape memory material and a substrate film. The substrate film does not require further processing and thus the composite can be used as a switch without removing any portion of the substrate on which the SMA is deposited. It is also shown that more effective switches can be manufactured by including as a component of the composite a stress compensating film.
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