Unit for transferring to-be-inspected object to inspection position
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United States of America Patent
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-
Oct 20, 1998
Grant Date -
N/A
app pub date -
Nov 21, 1996
filing date -
Nov 27, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A transfer unit according to the invention employs a transfer member movable between a standby position and an inspection position, a detection unit provided at the transfer member for detecting the position of the object on a support surface of the transfer member, a rotatable mount member having a mount surface on which the object is mounted, and capable of transferring the object between the mount surface and the support surface of the transfer member, and a control unit for calculating an amount of deviation of the object from a reference position on the basis of a detection value of the detection unit, the control unit also driving the mount member and the transfer member to correct the amount of deviation of the object from the reference position on the basis of the calculation result.
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