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Abstract

A sensor element for detection of a trace fluid component in a fluid stream or other fluid environment, comprising a piezoelectric crystal having a fundamental resonant frequency in response to an applied oscillating electric field, and an inert porous material coating on the piezoelectric crystal containing a metal species which is reactive with the trace fluid component to yield a solid interaction product of changed mass in relation to initial mass of the metal species interacting with the trace fluid component to yield the solid interaction product. Such sensor element may be employed in a sensor apparatus for applying an oscillating electric field to the piezoelectric crystal which generates an output resonant frequency therefrom, together with (i) sampling the output resonant frequency of the piezoelectric crystal, (ii) determining the change in resonant frequency occurring on formation of the solid interaction product, and (iii) generating an output indicative of the presence of the trace fluid component in the fluid environment. The sensor may be utilized for detection of hydride gases in environmental gas monitoring applications, as well as in end point detectors in scrubbing and other gas processing operations.

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First Claim