US Patent No: 5,828,496
Number of patents in Portfolio can not be more than 2000
Illumination optical system
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Oct 27, 1998
Issued date -
Dec 21, 1994
filing date -
08/361,042
serial no -
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Abstract
An illumination optical system includes a beam dividing device for dividing a radiation beam into plural illumination beams, and an optical arrangement for superposing the illumination beams one upon another on a surface to be illuminated, the optical arrangement having different focal distances in substantially orthogonal first and second directions, and the optical arrangement being adapted to focus each of the illumination beams on the surface in the first direction while defocusing the same in the second direction, whereby a linear illumination region is defined on the surface.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 4,682,885 Illumination apparatus | 54 | 1986 | |
| 4,851,882 Illumination optical system | 48 | 1988 | |
| 5,263,250 Method of manufacturing nozzle plate for ink jet printer | 54 | 1991 | |
| 5,091,744 Illumination optical system | 42 | 1991 | |
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| 4,733,944 Optical beam integration system | 107 | 1986 | |