Photo-sensor fiber-optic stress analysis system
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United States of America Patent
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Oct 27, 1998
Grant Date -
N/A
app pub date -
Mar 25, 1997
filing date -
Mar 25, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An x-ray diffraction system for determining stress in integrated circuit materials includes a source of x-rays (3) that are directed toward a sample holding mechanism for diffracting from the test sample (8). An x-ray detector (14) is arranged for detecting high back reflected diffracted x-ray intensity data representing stress in the test sample. A two-dimensional detection and storage arrangement (24) is arranged for detecting and storing the data representing stress in the test sample. A data processor (2) accesses the stored data from the two-dimensional detection and storage arrangement and processes the data representing stress in the test sample to determine stress in the test sample.
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