Handling device
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United States of America Patent
Stats
-
Nov 3, 1998
Grant Date -
N/A
app pub date -
May 13, 1996
filing date -
May 11, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A handling device, in particular for handling probes of a wafer testing device, includes a receiving device for a probe being disposed in such a way as to be adjustable in a vertical direction and in a horizontal direction relative to at least one vertical bearer. The receiving device is guided adjustably in a horizontal direction on a supporting part. The supporting part is guided adjustably in a vertical direction on the at least one vertical bearer. Furthermore, a counterweight device is constructed so as to counterbalance the weight of the probe, the receiving device and the supporting part. The counterweight device includes a carrying device for receiving counterbalance weights. The carrying device is aligned horizontally and for parallel motion includes at least three suspension devices for fixing a connector which is turned round associated guide pulleys and is connected to the supporting part.
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