Specialty gas purification system
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United States of America Patent
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Nov 10, 1998
Grant Date -
N/A
app pub date -
Mar 1, 1996
filing date -
Mar 1, 1996
priority date (Note) -
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Abstract
A method and apparatus are disclosed showing a system for continuous purification of bulk source specialty gases to less than 10 part per billion levels. Corrosive and non-corrosive specialty gases are purified using this system. Depending on whether corrosive or non-corrosive gases are being purified and the contaminants of concern, the purification beds contain an absorber and/or getter. A dual bed system allows one bed to purify at ambient temperatures while a second bed undergoes regeneration, providing continuous purification for a bulk source specialty gas.
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