Organometallic complexes of aluminium, gallium and indium
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United States of America Patent
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Nov 10, 1998
Grant Date -
N/A
app pub date -
Apr 4, 1996
filing date -
Aug 2, 1993
priority date (Note) -
Expired
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Abstract
Novel organometallic complexes of aluminium, gallium and indium are disclosed, having improved stability and volatility for use in CVD processes. These are donor ligand complexes of the formula MR.sub.2 L where M is the metal, R is an alkyl group and L is a ligand containing an amidine (R'N. . . C(R'). . . NR') group, where R' is H, alkyl etc.
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