Mobile charge measurement using corona charge and ultraviolet light
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United States of America Patent
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Nov 10, 1998
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N/A
app pub date -
Aug 11, 1997
filing date -
Aug 11, 1997
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Abstract
Corona charge is applied to an oxide layer on a semiconductor wafer. Then ultraviolet light is used to erase a grid pattern of the corona charge. Opposite polarity corona charge is then applied to the layer, resulting in a grid of field-induced PN junctions. The surface photovoltage of the junctions is measured over time to provide a measure of the mobile charge in the oxide layer.
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