Reflective spatial light modulator with encapsulated micro-mechanical elements
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United States of America Patent
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Nov 10, 1998
Grant Date -
N/A
app pub date -
Jun 18, 1996
filing date -
Jun 19, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A spatial light modulator, comprised of an upper and a lower substrate. One or more electrostatically deflectable mirrors are suspended by torsion hinges from an optically transmissive upper substrate. The upper substrate is held above the lower substrate containing electronic circuitry. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. An aperture layer is built into the upper substrate to enable light to reach only the flat mirror surfaces.
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