Importance

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Abstract

A wafer stand for facilitating the inspection, testing, and handling of large-diameter silicon wafers, such as those having a diameter of 8 inches (200 mm), during semiconductor processing and assembly. The stand consists of a lower plate or pedestal, a plurality of adjustable legs mounted thereon, and an upper plate mounted on the upper end of the legs. The top plate has an access aperture of a diameter coinciding approximately with that of the wafer, and can be adjusted such that the attitude and/or height of the upper plate in relation to the pedestal can be varied. In one embodiment, the front leg of the stand may be removed to provide better access to the bottom of the wafer. The upper plate is also provided with a pair of parallel tracks into which a wafer mounting frame can be slid to position the wafer over the access aperture. The wafer stand is constructed so as to permit its temporary mounting to a workbench or table, yet is fully transportable by one person. Additionally, the stand is constructed in such a way as to minimize the potential for contamination of the mounted wafer during use or transport.

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First Claim