Film forming apparatus with particle prevention plate
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United States of America Patent
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Nov 17, 1998
Issued Date -
N/A
app pub date -
Apr 22, 1996
filing date -
Dec 21, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A film-forming apparatus is provided with a particle prevention means, whose structure prevents a drop in film-yield due to particle formation. The particle prevention means does not need to be cleaned as frequently as known particle prevention means, thus increasing film production efficiency. This particle prevention means has a tongued-and-grooved surface. When the particle prevention means having a tongued-and-grooved surface is set in the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the particle prevention means, which can extend the time of film exfoliation, and in turn, extend the cycle for cleaning the particle prevention means, and prevent a drop in film-yield due to the film exfoliation.
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