Transfer system for use with a horizontal furnace
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United States of America Patent
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Nov 24, 1998
Grant Date -
N/A
app pub date -
Mar 13, 1996
filing date -
Mar 13, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for preventing the cross contamination of heating element within horizontal furnaces is disclosed. A rotating spindle may connect to either or both of the lifting arm of a triaxial loader or the transfer plate of a loading station. A pair of spindles are able to lift a single wafer boat. Each spindle includes a plurality of active positions with one active position associated with each heating element of the horizontal furnace. A control processor monitors the position of the spindle and rotates the spindle to the active position associated with a heating element when a loading or unloading process is initiated for that heating element.
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