Device for treatment of wafer-shaped articles, especially silicon wafers
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 8, 1998
Grant Date -
N/A
app pub date -
Dec 11, 1996
filing date -
May 2, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In chamber (1) a basket which is formed by ring (3) and retaining fingers (4) is pivotally mounted. By turning the basket, wafer-shaped article (7) which is held by retaining fingers (4) at an axial distance from ring (3) is caused to rotate. Nozzle (10 and 11) from which a treatment fluid can be applied to article (7) is assigned both to upper and lower large surface (9) of article (7).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully