Sputtering target protection device
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United States of America Patent
Stats
-
Dec 8, 1998
Grant Date -
N/A
app pub date -
May 14, 1997
filing date -
May 14, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A sputtering target protection device for covering and protecting the precisely machined and engineered surface of a sputtering target assembly during shipment, intermediate handling and installation of the target assembly. The protection device includes a top wall preferably having the same general circumferential configuration as the top surface of the target, and an integral skirt which depends from the top wall. The depending skirt is adapted to frictionally engage a side surface of the sputtering target while the top wall of the protection device is spaced from the sputtering surface to cover and protect the surface during shipment and installation of the target assembly. The protection device is designed to be single-use and disposable. Methods are also disclosed.
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