Computed tomography metrology
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United States of America Patent
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Dec 8, 1998
Grant Date -
N/A
app pub date -
May 2, 1997
filing date -
May 2, 1997
priority date (Note) -
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Abstract
The invention is a three-dimensional computed tomography method for inspecting and comparing actual geometry to predetermined geometry of an object. The method includes the following steps: A) three-dimensionally scanning the object using computed tomography to produce multiple slices of actual geometrical data of the object; B) processing the multiple slices of actual geometrical data into actual boundary data which defines internal and external boundaries of the object; and C) producing actual point cloud data from the actual boundary data. The method further includes comparing the actual point cloud data to object geometry predetermined data. The comparing may include outputting an image comparing the point cloud data to the predetermined data and the image may represent the geometry of non-conformance between the point cloud data and the predetermined data. The image may be rotated to present the non-conformance from different viewpoints around the feature.
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