A method, apparatus and system for verifying the establishment of a pattern includes a unit for storing a template of the pattern, a unit for acquiring an image of the established pattern, a first image processing unit to alter at least one of said template and acquired images to produce at least two resultant images, a comparison unit to compare the two resultant images with the other of said template and acquired image and a unit to evaluate the results of each comparison to determine if the established pattern includes a defect. Both gray scale and binary processing and comparisons are disclosed for use as required.
* 9626731 Image processing apparatus and image processing method that calculate a number of pixels, required for outputting a size of an output image, according to obtained processing parameters and a predetermined processing order
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