Vacuum treatment system for applying thin layers to substrates such as headlights reflectors

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United States of America Patent

PATENT NO 5849087
SERIAL NO

08886675

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a vacuum treatment system for applying thin layers to substrates (2, 2', . . . ) such as headlight reflectors, with several treatment (8, 9, 10) and/or inward and outward transfer lock stations (20) supported on a stationary vacuum chamber wall (16, 16', . . . ) and with a rotatably supported internal cylinder (14), which is enclosed by the vacuum chamber wall and carries the substrate chambers (3-6), openings (24-27) are provided in the vacuum chamber wall (16, 16', . . . ), with which the substrate chambers (3-6) can be aligned and through which the treatment agents can be allowed to act on the substrates (2, 2', . . . ) and/or through which the substrates can be transferred in and out, where one of the substrate chambers, but at least the inward/outward transfer lock chamber (20), has as cover or a sealing flap (33), which allows direct access to the corresponding substrate chamber, and where the chamber (20) can be shifted (A, B) toward the internal cylinder (14) and pressed against the outside wall of the cylinder (14) or against the frame-like end surface of the substrate chamber (3).

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Patent Owner(s)

Patent OwnerAddress
LEYBOLD SYSTEMS GMBHHANAU AM MAIN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Henrich, Jurgen Limeshain, DE 15 86
Hoffmann, Josef Worth am Main, DE 12 85
Kloberdanz, Hermann Linsengericht-Geislitz, DE 3 73

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