Method of manufacturing electron-emitting device, electron source and image-forming apparatus
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United States of America Patent
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Dec 29, 1998
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app pub date -
Nov 28, 1995
filing date -
Nov 29, 1994
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Abstract
A method of manufacturing an electron-emitting device includes providing a pair of electrodes and an electroconductive thin film arranged between the electrodes. The method also includes a step of forming an electron-emitting region in the electroconductive film by the steps of partially modifying the composition of the electroconductive thin film with a chemical change to make a region of the electroconductive thin film have a higher resistivity than a resistivity in other regions, and causing an electric current to run through the electroconductive thin film to form the electron-emitting region in the region having the higher resistivity.
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