Treatment system and treatment apparatus with multi-stage carrier storage chambers
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United States of America Patent
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-
Dec 29, 1998
Issued Date -
N/A
app pub date -
Mar 25, 1996
filing date -
Mar 19, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and a first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply pipe and an exhaust pipe are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A open/close valve device is provided for each of the inert gas supply pipes and the exhaust pipes.
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