Method for developing treatment
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 29, 1998
Grant Date -
N/A
app pub date -
May 7, 1997
filing date -
May 8, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention provides a method for developing treatment, in which a developing solution is supplied to an object to be treated for performing a developing treatment, comprising the steps of supplying pure water onto a surface of said treating object for forming a pure water film on the surface of the treating object, and supplying a developing solution onto the surface of the treating object having the pure water film formed thereon in the preceding step. The particular method of the present invention permits markedly suppressing a defective development.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully