Electronic device comprising an integrated time base
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United States of America Patent
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-
Jan 5, 1999
Grant Date -
N/A
app pub date -
Mar 12, 1997
filing date -
Mar 15, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
An electronic device (1) has a substrate (2) of monocrystalline silicon on which is an integrated circuit (3). The integrated circuit is an oscillator containing a resonator, a maintenance circuit to cause the vibration of the resonator, and a frequency division chain. The maintenance circuit as well as the division chain are manufactured as CMOS circuits. The resonator is an integrated resonator (4) formed of a body cut out in a delimited surface part of reduced thickness (14) of the substrate (2), of a thin layer of piezoelectric material (10) deposited on at least a part (6) of the body, and of a thin metallic layer (11) deposited on the piezoelectric layer (10) so as to form an electrode.
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