Vacuum chuck
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United States of America Patent
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-
Jan 12, 1999
Grant Date -
N/A
app pub date -
Oct 25, 1996
filing date -
Oct 27, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum chuck according to the present invention includes a base plate having an outer wall formed in a predetermined height around the base plate. In addition, at least one inner wall, having the same height as the outer wall, is formed on the base plate so as to divide the space surrounded by the outer wall into a plurality of compartments. A plurality of vacuum holes are provided in the respective compartments and connected to a vacuum source. By using the vacuum chuck according to the present invention, variously sized parts can be fixed to the vacuum chuck by making the compartments of the vacuum chuck in various sizes.
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