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Abstract

High quality diamond excellent in crystalline property as well as transparency, can be synthesized at a high growth speed by a process which comprises using, as a raw material gas, a mixed gas of hydrogen gas A, an inert gas B, a carbon atom-containing gas C and an oxygen atom-containing inorganic gas D in such a proportion as satisfying the following relationship by mole ratio: 0.001.ltoreq.B/(A+B+C+D).ltoreq.0.95 0.001.ltoreq.C/(A+B+C+D).ltoreq.0.1 0.0005.ltoreq.D/C.ltoreq.10 except where a same gas is chosen from the carbon atom-containing gas C and the oxygen atom-containing inorganic gas D, feeding the mixed gas into a reactor in which plasma is then formed by applying a DC or AC electric field at a pressure of 10 to 760 torr and thereby depositing and forming diamond on a substrate arranged in the reactor.

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First Claim